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Technical Information
Specification
PH-3515F
MIT-172-868E
XY Stage Travel Range
254 × 152 mm
Measurement Method
Linear Encoder
Resolution
0.001 mm or .0001" / 0.001 mm (Using Optional KA Counter)
Focusing Method
Manual
Quick-Release Mechanism
X Axis
XY Stage Top Size
450 × 146 mm
Swivel Function
±10°
Maximum Stage Loading
45 kg
Contour Illumination
Light Source
Halogen Bulb (24V, 150W)
Optical System
Telecentric
Functions
2-Step (High/Low) Brightness Switch, Heat-Absorbing Filter, Cooling Fan